[±Û·Î¹ú žƼ¾î ¹ÝµµÃ¼ ±â¾÷] Process Integration (ÇØ¿Ü ±Ù¹«)
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Process Integration |
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[ÀÚ°Ý¿ä°Ç] - ¹ÝµµÃ¼ ÁÖ¿ä °øÁ¤ (lithography, dry etch, wet etch, CMP, thin film, diffusion, implantation, metrology µî) 1°³ ÀÌ»ó¿¡ ´ëÇÑ »ó¼¼ Áö½Ä ¹× 8³â ÀÌ»ó °ü·Ã °æÇè - °øÁ¤ ÅëÇÕ¿¡ ´ëÇÑ ÀÌÇØµµ - º¹ÀâÇÑ ±â¼ú ÇÁ·ÎÁ§Æ® ¸®µù ¹× ¼º°øÀû ¿Ï·á °æÇè - Çõ½ÅÀû ¼Ö·ç¼Ç Á¦°ø °æÇè - ¾÷¹«»ó ÇÊ¿äÇÑ ¿µ¾î ¼ÒÅë ´É·Â Çʼö [¿ì´ëÁ¶°Ç] - °øÇÐ ¶Ç´Â °úÇÐ ºÐ¾ß ¼®, ¹Ú»ç ÇÐÀ§ º¸À¯ |
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